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Strong fringe coupling on the undoped underlap region is observed by introducing
high- k dielectric spacer. This helps in arranging the inversion charge carriers for
which the extra parasitic series resistance is reduced that increases I on . It is clear from
Fig. 3 that, as the spacer- k increases, there is an improvement in device performance
due to strong electric field coupling between a gate terminal and the underlap regions.
Both, the I on and the I on /I off parameter increases with an increasing spacer dielectric
value due to an increased GFIBL effect [8]. The I on /I off ratio initially increases with
the increase in underlap (Fig. 3(c)) and then becomes saturates after 4nm.
Fig. 4. Variation of the normalized (a) total gate capacitance, (b) drive current-to-total gate
capacitance ratio ( I on / C GG ) and (c) the gate intrinsic delay for different spacer with varying
underlap length ( L un )
The variation in total gate capacitance ( C GG ) with L un for different spacer materials
are shown in Fig. 4(a). The gate capacitance is normalized with the reference device
with zero-underlap having low- k (SiO 2 ) spacer material. Clearly, the C GG decreases with
increasing underlap. Since, both the C GG and the I on decrease with the underlap there-
fore, performance will also change depending on their rate of decrease. The I on / C GG
must be enough high to substantially reduce the delay. For zero underlap, the I on / C GG
asset values decrease by introducing high- k spacers. Furthermore, it decreases with
increasing underlap and for L un =16nm underlap length; the I on / C GG is at minimum and
same for different spacer materials. Fig. 4(c) indicates that the intrinsic delay through
the circuit with high underlap will be more than that of a non-underlap case.
4
SRAM Performance Projections
This section provides the cell operation and methodology used in the underlap FinFET
SRAM cell. The schematic of the tied-gate 6-T SRAM cell is presented in Fig. 5(a). The
thick red and blue lines represent the large line capacitances associated with the word-
line (WL) and bit lines (BL and BLB), respectively. The PMOS pull-up transistors (PU L
and PU R ) and NMOS access transistors (PA L and PA R ) are of minimum size to set a
pull-up ratio of one. Analyses are drawn based on the simulations performed for cell-
ratio two, by using double-fin of the pull-down transistors (PD L and PD R ).
During the hold mode, node Q and QB store logic "1" and "0", respectively and
word-line is off. Hold-SNM defines the stability in retention to preserve the stored
data. During a read operation, the word-line access transistors are ON after the bit
lines are precharged. The read-SNM is the metric used in read mode for reliable oper-
ation [9]. For higher read stability, access transistor strength must be low. Read access
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