Image Processing Reference
In-Depth Information
(a)
φV1
φV2
φV3
φV4
φ1
φ2
φ3
φ4
Transfer electrode
(polysilicon, etc.)
n -
Gate-insulating film
(SiO 2 , Si 3 N 4 , etc.)
(buried channel)
Silicon substrate
p
Charge
packet
(b)
t 1-1
t 1-2
t 1-3
t 1-4
t 1-5
t 1-6
t 1-7
t 1-8
t 2-1
FIGURE 5.2
Four-phase CCD: (a) cross-sectional view; (b) schematic diagram of charge transfer.
H
φ1
L
H
φ2
L
H
φ3
L
H
φ4
L
t 1-1
t 1-2
t 1-3
t 1-4
t 1-5
t 1-6
t 1-7
t 1-8
t 2-1
FIGURE 5.3
Driving clock pulse of overlapping four-phase CCD.
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