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Only for some flexure w
range of 1MHz to 10MHz,
for flexure width of 15µ m.
width values the structure resonance frequency lies in
, maximum displacement is obtained at 4 MHz freque
the
ency
4.1.3 Effect of Flexure Le
ength on Free Edge Displacement
Displacement of free end w
constant flexure width [1µ m
with change in flexure length at constant height [1µ m]
m] is shown in Fig. 7.
and
Fig. 7.
Free
e end displacement with varying flexure length
Here we observe that the f
frequency. The flexure length
From the above simula
increases the folded beam
construct an structure that p
have selected parameters a
µ m from the simulated struc
flexure length of 20µ m give maximum displacement at 4M
h to width ratio is 20:1 for 4MHz resonance frequency.
ations we have concluded that as the structure hei
displacement decreases. There are many possibilities
provide resonance frequency of 4 MHz, for our design
s flexure length 46 µ m, flexure width 10 µ m and heigh
cture whose response is shown in Fig. 8.
MHz
ight
s to
we
ht 6
Fig. 8.
Total displacement
t for flexure width=1.0e-5, flexure length=4.6e-5, height=6e-6
