Information Technology Reference
In-Depth Information
Frequency domain analy
where total force of 1µN is
ysis is performed for frequency range 1MHz to 10 M
applied at the free end of folded beam.
MHz,
4.1.1 Effect of Structur
Variation in free end displa
for a range of 1[µ m] to 15[µ
re Height on Free Edge Displacement
acement is observed according to change in structure hei
µm] as shown in Fig 5.
ight
Fig. 5.
Variation
n in folded beam free with change in structure height
Flexure width (1µ m) and
is observed from the graph
with increase in the structur
d flexure length (10µ m) is kept constant during analysi
that the displacement of free edge decreases exponenti
re height.
s. It
ally
4.1.2 Effect of Flexure W
The folded beam flexure w
2µ m. precaution is taken s
not less than 4 times the
(80µm) and structure heigh
Width on Free Edge Displacement
width varies for a range of 1µm to 20µm at a step size
selecting the proper values so that the flexure length sh
flexure width.
Free end displacement
for flexure len
t (1µ m) is shown in Fig. 6.
e of
hall
ngth
Fig. 6.
Displacem
ment Vs. Frequency plot for different flexure width
