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3
Accelerometer Structure
The Accelerometer structure present in this paper is based on out-of-plane sensing
where a pair of fixed-free folded beam support is attached to the proof mass, two pairs
of comb structures are attached for capacitance sensing. 3-D structure of proposed
structure is shown in Fig 2.
Fig. 2.
3-D structure of folded beam accelerometer
Proof mass, folded beam and comb fingers are the three basic components of the
accelerometer structure. Comb structure form interdigited fingers between fixed and
free comb where capacitance change is sensed shown in Fig 3.
Fig. 3.
Basic interdigited fingers
Capacitance formed by the structure at stationary position [10] is given by
