Information Technology Reference
In-Depth Information
sensing structure relative to
movement or out-of-plane
increases the required addit
The model presents in this
applications. Advantage of
sensor. It has high sensitivit
o some frame of reference and it is two types either in-pl
[9]. The point should be noted that as the sensing a
tional circuitry increases and hence the device complex
paper is based on out-of-plane sensing technique for lo
capacitive design is that it can be used as both actuator
ty, high resolution, low noise and increased bandwidth e
lane
axis
xity.
w g
and
etc.
2
Accelerometer M
Model
The basic accelerometer m
reference frame. Proof mas
inertia as shown in Fig 1.
model consists of a spring mass damper model withi
s motion (
X
m
) lags to the frame motion (
X
f
) due to mas
in a
s of
Fig. 1.
Basic Accelerometer model
Where, 'm' is mass, '
k
applied on the mass results
is given by
'
is spring constant, 'Ęł' is damping constant. A force
in displacement
X
m
, the equation of motion of proof m
e is
mass
Where Fe
is the actuatin
by subtracting
(1)
ng force acting on the mass, equation (1) can be simplif
m both sides leading to
fied
from
difference in reference frame and mass positions, now
uce as
(2)
Here
is the d
equation can be further redu
the
on of inertial and actuating forces
(3)
Where F is the summatio
