Expectations for Future Microand Nanotechnologies - Implications of Emerging Micro-and Nanotechnologies - page 12

1,000

100

Pentium 4

R

10

P6

Pentium R

486

1

386

0.1

286

8086

8085

0.01

8080

8008

4004

0.001

1970 1980 1990 2000 2010

Year

FIGURE 2-1 Integrated circuit growth. SOURCE: Adapted from Intel. 2002. Moore's
Law. Available online at <http://www.intel.com/research/silicon/mooreslaw.htm> [May
31, 2002].

95 97 99 01 04 07 10 13 16

500

350
250

180

130
100

Lithography Half - Pitch

90

(ITRS 2000 and 2001)

70
50

65

2000

45

35

32
22

2001

25

Gate Length

15

return to 0.7x/3-yr

13

10

9

5

1995 1997 1999 2001 2004 2007 2010 2013 2016

Year of Production

FIGURE 2-2 Lithography half-pitch feature size versus time. SOURCE: Adapted from
the International Technology Roadmap for Semiconductors, 2001 edition. Austin, Tex.:
International SEMATECH.