Biomedical Engineering Reference
In-Depth Information
Grooves and Pits
Photolithography and anisotropic
etching
Titanium - coated epoxy
replicas of silicon
original
V - shaped grooves
35 - 165
—
μ
m width
30 - 120
m depth
V - shaped pits 35 - 270
μ
μ
m width
and 30 - 120
μ
m depth
Ridges
Photolithography and reactive ion
etching
Polystyrene cast of
silicon original
0.5 - 100.0 μ m width
0.03 - 5.0 μ m height
—
Evaporative coating
Silicon oxide on
Polystyrene
4 μ m width
50 nm height
Steps
Photolithography and reactive ion
etching
PMMA
1 - 18 μ m steps
—
Waves
Solution polymerization
PDMS gels of varying
softness
Softer gels had smaller waves
while hard gel had larger waves
—
Wells and Nodes
Photolithography and etching
PDMS replicas of
silicon original
2, 5 μm diameter round
nodes, 0.38 and 0.46 μ m high
respectively 8 μm round well,
0.57 μ m deep
—
Laser modifi cation
Polycarbonate,
polyetherimide
Square nodes
7, 25, or 50
μ
m width
0.5, 1.5, 2.5
μ
m height
Pillars and Pores
Laser ablation used in conjunction
with masks made by electron-
beam lithography, reactive ion
etching
PMMA, PET,
polystyrene
Circular pillars and pores
1 - 50
—
μ
m diameter
Pores
Micro porous fi lter: Nylon dip-
coated with PVC/PAN copolymer
Uncoated and silicon
coated fi lters
—
0.2 - 10
μ
m diameter
Spheres
Particle settling
Poly(NIPAM) particles
on polystyrene surface
0.86 - 0.63
m diameter when
temperature raised from 25 to
37 ° C
μ
—
Cylinders
Fiber - optic light conduit - fused
quartz cylindrical fi bers placed on
agarose - covered cover slips
Fused quartz
12 - 13 or 25
μ
m radii
—
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