Biomedical Engineering Reference
In-Depth Information
Grooves and Pits
Photolithography and anisotropic
etching
Titanium - coated epoxy
replicas of silicon
original
V - shaped grooves
35 - 165
μ
m width
30 - 120
m depth
V - shaped pits 35 - 270
μ
μ
m width
and 30 - 120
μ
m depth
Ridges
Photolithography and reactive ion
etching
Polystyrene cast of
silicon original
0.5 - 100.0 μ m width
0.03 - 5.0 μ m height
Evaporative coating
Silicon oxide on
Polystyrene
4 μ m width
50 nm height
Steps
Photolithography and reactive ion
etching
PMMA
1 - 18 μ m steps
Waves
Solution polymerization
PDMS gels of varying
softness
Softer gels had smaller waves
while hard gel had larger waves
Wells and Nodes
Photolithography and etching
PDMS replicas of
silicon original
2, 5 μm diameter round
nodes, 0.38 and 0.46 μ m high
respectively 8 μm round well,
0.57 μ m deep
Laser modifi cation
Polycarbonate,
polyetherimide
Square nodes
7, 25, or 50
μ
m width
0.5, 1.5, 2.5
μ
m height
Pillars and Pores
Laser ablation used in conjunction
with masks made by electron-
beam lithography, reactive ion
etching
PMMA, PET,
polystyrene
Circular pillars and pores
1 - 50
μ
m diameter
Pores
Micro porous fi lter: Nylon dip-
coated with PVC/PAN copolymer
Uncoated and silicon
coated fi lters
0.2 - 10
μ
m diameter
Spheres
Particle settling
Poly(NIPAM) particles
on polystyrene surface
0.86 - 0.63
m diameter when
temperature raised from 25 to
37 ° C
μ
Cylinders
Fiber - optic light conduit - fused
quartz cylindrical fi bers placed on
agarose - covered cover slips
Fused quartz
12 - 13 or 25
μ
m radii
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