Biomedical Engineering Reference
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Fig. 8.30
Higher
magnification of Fig.
8.29
showing thin areas observable
in HRTEM in the PZT film,
but hardly observable in the
Ti/Pt/PZT interface
(
J. Ayache, Cheng Y. Song
NCEM, Berkeley
)
Fig. 8.31
SEM image in the
FIBattheendof
cross-sectional preparation on
a pre-thinned slice. Porosities
are visible in the PZT layer
(
arrows
). (
V. Radmilovic,
J. Ayache NCEM, Berkeley
)
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