Development and optimization of a laser carbonized polyimide film as a sensor substrate for an all-polymer humidity sensor - Polyimides and Other High Temperature Polymers - page 443

Figure 7. Frequency dependence of the all-polymer sensor response.
3.5. Comparison with alumina/gold substrate
The benchmark sensor was compared directly to results reported by the Sakai re-
search group of Ehime University of Japan [25]. Sakai's sensor was tested at
30°C while ours was tested at 20°C. We tested a sample sensor from 20°C-40°C
and observed no difference in dynamic range. The sensor performance compared
well with the alumina/gold sensor substrate fabricated by the Sakai group (Fig-
ure 6). However, the two sensors were tested at different temperatures and this
could have some impact on a direct comparison of the slight hysteresis noticed in
the low humidity range.
4. CONCLUSIONS
This research has demonstrated that an all-polymer sensor substrate is a viable
substitute for the alumina/gold substrate used in current sensor designs. The dy-