Chemistry Reference
In-Depth Information
100 µm
FIGURE 7.13
XPS O 1s image of a lateral chemical micropattern created by a multistep
microwave plasma process. (From Schröder, K. et al.,
Surf. Interface Anal.,
36, 702, 2004.)
7.3 ANALYSIS WITH ION BEAMS BY ENERGY LOSS
SPECTROSCOPY
In this section the surface analysis due to interaction of ion beams with material
surfaces will be presented.
7.3.1 R
UTHERFORD
B
ACKSCATTERING
S
PECTROMETRY
For the RBS method [48] a sample is irradiated with light energetic ions, in most
cases hydrogen, helium, or neon of a few MeV are used. At a backward angle close
to 180
◦
relative to the beam direction the number and the energy of projectile ions
backscattered from the target are measured (Figure 7.14a).
Since these values are dependent on the mass respectively on the nuclear charge
of the scattering atoms and because the projectiles sustain an energy loss in the
E
0
Projectile
M
p
M
p
Projectile
E
0
E
0
Ω
E
1
Ω
E
2
φ
M
r
δ
Ta r g e t a t o m
θ
M
r
θ
E
1
φ
M
p
E
2
(a)
(b)
FIGURE 7.14
Measuring principle for RBS (a) and ERDA (b).
