Chemistry Reference
In-Depth Information
TABLE 7.1
Surface and Thin Film Properties and Methods of Analysis
Thin Film/Surface Properties
Thin Film/Surface Analysis
Thickness
XRF
a
,SEM
b
,XR
c
, ellipsometry
Density
XR
c
, ellipsometry
Grain size
XRD
d
, TEM
e
,SEM
b
, AFM
f
Surface topography
SEM
b
, TEM
e
, AFM
f
Hardness
Brinell-, Vickers-, Rockwell-Hardness
Stress, strain
XRD
d
, substrate curvature
Wettability
Contact angle methods
Optical properties
Refractometry, ellipsometry
Refraction index, reflectivity, absorbance
Resistivity
Four point method
Chemical composition
AAS
g
,AES
h
,ICP-MS
i
, XPS
j
,EDX
k
,SIMS
l
,
XRD
d
, RBS
m
,ERDA
n
,ESR
o
, GDMS
p
Constitution/structure
XPS
j
,FTIR
q
, Raman spectroscopy,
NMR
r
,SIMS
l
,XRD
d
, LEED
s
Phase composition
XRD
d
, TEM
e
a
XRF: x-ray fluorescence analysis
b
SEM: scanning electron microscopy
c
XR: x-ray reflectometry
d
XRD: x-ray difractometry
e
TEM: transmission electron microscopy
f
AFM: atomic force microscopy
g
AAS: atom absorption spectroscopy
h
AES: Auger electron spectroscopy
i
ICP-MS: inductive coupled plasma mass spectrometry
j
XPS: -ray photoelectron spectroscopy
k
EDX: energy dispersive x-ray spectroscopy
l
SIMS: secondary ion mass spectrometry
m
RBS: Rutherford back scattering
n
ERDA: elastic recoil detection analysis
o
ESR: electron spin resonance
p
GDSM: glow discharge mass spectroscopy
q
FTIR: Fourier transform infrared spectroscopy
r
NMR: nuclear magnetic resonance
s
LEED: low energy electron diffraction
This chapter deals with physical methods such as XPS, XRD, RBS, ERDA, FTIR,
MALDI-ToF, SIMS, and ESR. Here the principles of the methods will be explained
and illustrated by examples of plasma chemistry.
Typical chemical methods and other physical methods like ELMI, AFM, as well
as electrical methods are dealt in related textbooks
The diagnostics of solids by probing with beams can be classified as in Table 7.2.
