Chemistry Reference
In-Depth Information
419. C. H. Lee and F. A. Kroger, Cathodic deposition of amorphous alloys of silicon, carbon and fluorine,
J. Electrochem. Soc. 129 , 936, 1982.
420. K. D. Beyer and R. H. Kastl, Impact of deionized water rinse on silicon surface cleaning, J. Elec-
trochem. Soc. 129 , 1027, 1982.
421. L. Fornarini, F. Stirpe, and B. Scrosati, Electrochemical solar cells with layer-type semiconductor
anodes. Nonaqueous electrolyte cells, J. Electrochem. Soc. 129 , 1155, 1982.
422. P. M. Sarro and A. W. van Herwaarden, Silicon cantilever beams fabricated by electrochemically con-
trolled etching for sensor applications, J. Electrochem. Soc. 133 , 1724, 1986.
423. Y. Fukuda, W. Zhou, K. Furuya, and H. Suzuki, Photoluminescence change of as-prepared and aged
porous silicon with NaOH treatment, J. Electrochem. Soc. 146 , 2697, 1999.
424. K. H. Beckmann and N. J. Harrick, Hydrides and hydroxyls in thin silicon dioxide films, J. Elec-
trochem. Soc. 118 , 614, 1971.
425. D. M. Brown and P. R. Kennicott, Glass source B diffusion in Si and
J. Electrochem. Soc. 118 ,
293, 1971.
426. R. O. Schwenker, Etch rate characterization of borosilicate glasses as diffusion sources, J. Elec-
trochem. Soc. 118 , 313, 1971.
427. P. F. Schmidt and J. D. Ashner, Tracer investigation of hydroxyls in
films on silicon, J . Elec-
trochem. Soc. 118 , 325, 1971.
428. J. Wong, Vapor deposition and properties of binary arsenosilicate glass films, J. Electrochem. Soc.
129 , 1071, 1972.
429. M. Ghezzo and D. M. Brown, Arsenic glass diffusion in Si and
J. Electrochem. Soc. 120 , 110,
1973.
430. G. L. Kuhn and C. J. Rhee, Thin silicon film on insulating substrate, J. Electrochem. Soc. 120 , 1563,
1973.
431. E. H. Snow and B. E. Deal, Polarization phenomena and other properties of phosphosilicate glass
films on silicon, J. Electrochem. Soc. 113 , 263, 1966.
432. W. D. Mackintosh and H. H. Plattner, The identification of the mobile ion during the anodic oxida-
tion of silicon, J. Electrochem. Soc. 124 , 1950, 1977.
433. M. W. Jenkins, A new preferential etch for defects in silicon crystals, J. Electrochem. Soc. 124 , 757,
1977.
434. E. Bassous and E. F. Baran, The fabrication of high precision nozzles by the anisotropic etching of
(100) silicon, J. Electrochem. Soc. 125 , 1231, 1978.
435. A. Reisman, M. Berkenblit, S. A. Chan, F. B. Kaufman, and D. C. Green, The controlled etching of
silicon in catalyzed ethylenediamine-pyrocatechol-water solutions, J. Electrochem. Soc. 126 , 1407,
1979.
436. K. H. Jung, S. Shih, and D. L. Kwong, Developments in luminescent porous Si, J. Electrochem. Soc.
140 , 3046, 1993.
437. H. J. Lewerenz, T. Bitzer, M. Gruyters, and K. Jacobi, Electrolytic hydrogenation of silicon, J. Elec-
trochem. Soc. 140 , L44, 1993.
438. E. Hsu, H. G. Parks, R. Craigin, S. Tomooka, J. S. Ramberg, and R. K. Lowry, Deposition charac-
teristics of metal contaminants from HF-based process solutions onto silicon wafer surfaces, J. Elec-
trochem. Soc. 139 , 3659, 1992.
439. Standard Test Method for Crystallographic Perfection of Silicon by Preferential Etch Techniques,
ASTM Standard, F47-88, Annual Book of ASTM Standards, Vol.10.05, p.65, 1988.
440. Standard Test Method for Crystallographic Perfection of Silicon by Preferential Etch Techniques,
ASTM Standard, F80-88a, Annual Book of ASTM Standards, Vol.10.05, p.130, 1988.
441. Standard Test Method for Crystallographic Perfection of Silicon by Preferential Etch Techniques,
ASTM Standard, F110-88, Annual Book of ASTM Standards, Vol.10.05, p.117, 1988.
442. Standard Test Method for Crystallographic Perfection of Silicon by Preferential Etch Techniques,
ASTM Standard, F154-88, Annual Book of ASTM Standards, Vol.10.05, p.220, 1988.
443. R. Herino, Porous silicon for microelectronics and optoelectronics, Mater. Sci. Technol. 13 , 965, 1997.
444. K. A. Jackson and A. F. Witt, Silicon: Preparation and properties, in Encyclopaedia of Materials
Science and Engineering, p. 4427, Pergamon Press, Elmsford, NY, 1986.
445. K. S. Choe, On the improper use of Yang preferential etching in determining precipitates in crystalline
silicon, J. Electrochem. Soc. 142 , 1647, 1995.
Search WWH ::




Custom Search