Chemistry Reference
In-Depth Information
Figure2.10.
The normalized intensity
I
int
/
I
0
depending on glancing angle
α
and depth
z.
The
negative
z
values characterize the region below the surface inside the Si wafer. There is one single
antinode at
z
=
0 for
α
crit
=
0.1
°
. For
α
>
α
crit
, the intensity exponentially decreases with the
penetration depth
z
n
, which is about 62 nm. For
α
<
α
crit
, the intensity is evanescent within a
few nanometers. Figure from Ref. [10], reprinted with permission from the author.
This quantity may be of special interest. It is correlated to the minimum
penetration depth
z
0
defined by Equation 1.79 for
α
<<
α
crit
. Both quantities
a
crit
and
z
0
differ by the factor 2
π
. Like the minimum depth
z
0
, the period
a
crit
is
also a material constant that is independent of the wavelength or photon energy
of the primary beam. Table 2.1 summarizes
a
crit
and
z
0
values calculated
according to Equations 2.18 and 1.80, respectively.
2.2.2StandingWaveFieldsWithinaThinLayer
Next to an infinitely thick substrate, a thin homogeneous layer on such a
substrate is of particular interest. The paths of X-rays for the two different
cases, A and B, have already been shown in Figure 2.1. Constructive or
destructive interference was demonstrated for the two reflected beams propa-
gating in the same direction. They result in Kiessig maxima and minima of the
reflectivity appearing for certain angles or
directions
,
α
k
.
Both reflected beams not only interfere with each other, they also jointly
interfere with the incoming beam though propagating in a different direction.
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