Biomedical Engineering Reference
In-Depth Information
1335 cm
−
1
1336 cm
−
1
1338 cm
−
1
(a)
(b) (c)
1200
1250
1300
1350 1400
Wave number (cm
−
1
)
1450
1500
1550
1600
FIGURE 15.9
Raman spectra at positions A, B, and C corresponding to SEMs.
4
3.5
A
3
2.5
B
2
C
1.5
1
0.5
0
800
850
900
950
1000
Substrate temperature (
o
C)
FIGURE 15.10
Effects of substrate temperature on the biaxial stress at positions (A),
(B) and (C) on the dental bur. Positions A, B and C relate to those in
Figure 15.6.
where
v
0
is 1,332 cm
1
and
v
s
is the observed maximum of the singlet phonon in the spectrum. Film
stress at positions A, B, and C were calculated to be
3.4,
2.3, and
1.7 GPa, in compression,
respectively.
Figure 15.10
shows the residual stress in the diamond film grown on the cemented WC-
Co dental bur as a function of the substrate temperature. It is entirely reasonable that the highest
stress occurs where the deposition temperature is greatest.
