Biomedical Engineering Reference
In-Depth Information
Si wafer
Treatment with “Piranha” solution
OH
OH
OH
OH
OH
OH
OH
OH
OH
Si wafer
Treatment with 3 TPM solution
O
O
O
O
O
O
Si
Si
Si
Cl
OH
Cl
Cl
Cl
Cl
Cl
Cl
OH
OH
OH
OH
OH
OH
OH OH
Si wafer
Formation of silane monolayer
O
O
O
O
O
O
Si
Si
Si
O
O
O
O
O
O
O
O
O
Si wafer
FIGURE 11.5
Silanization of silicon substrate.
