Biomedical Engineering Reference
In-Depth Information
The top-down approach is being used to coat various coatings to give improved functionality. For
example, vascular stents are being coated using CVD technology with ultrathin diamond-like carbon
coatings in order to improve biocompatibility and blood flow (
Figure 1.5
). Graded a-Si
Cy:H inter-
facial layers result in greatly reduced cracking, enhanced adhesion.
Light
Mask
Photoresist
Deposited film
Substrate
Film deposition
Photoresist application
Exposure
Etch mask
Development
Etching
Resist removal
FIGURE 1.3
A typical process sequence employed in the electronics industry to generate functional devices at the
micro- and nanoscale
[3]
.
Ga focused
ion beam
5
Beam scan
direction
4
3
2
1
Gas inlet
10
-3
Pa
Source gas
Deposited
materials
Substrate
FIGURE 1.4
Demonstration of three-dimensional nanostructure fabrication
[4]
.
