Biomedical Engineering Reference
In-Depth Information
Chapter 6
Fabrication of Biosensor Chips
Wei Te Wu,
a,
*
Guo-Hua Feng,
b
and Wen Hsin Hsieh
b
a
Department of Biomechatronics Engineering,
National Pingtung University of Science and Technology,
1, Shuefu Road, Neipu, Pingtung 912, Taiwan, ROC
b
Department of Mechanical Engineering, National Chung Cheng University,
168, University Road, Ming Hsiung, Chia Yi 621, Taiwan, ROC
*
weite@mail.npust.edu.tw
This chapter introduces four production techniques based on
polymer substrate as its core element for fabrication of biosensor
chips, and also discusses the combined use of optical grating or
iber as an element to produce a sensor component. The four key
technologies are photolithography, soft lithography, fabrication of
diffraction gratings, and production of optical iber windows.
6.1 PhotolithographyProcess
Currently a variety of materials could be applied to the fabrication
of biochips [1]. Among them, the PDMS-based biochip is most
popular due to its easy preparation and low-cost merits. Typically,
liquid PDMS is poured onto a designed mold, which is usually
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