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(a)
(B)
(A)
L
W
t
Figure 7.10
(a) (A) SEM image of five microfabricated (poly)silicon rectangular cantilevers
of different lengths. They are all supported by the same silicon chip. (B) Zoomed image of a
cantilever with length
L
= 100 µm, width = 40 µm, and thickness
t
= 0.5 µm (images by IMM,
Mainz, Germany). Source:
Figure 1 from Ref.
43
.
Reproduced with permission.
(b) Schematic
of possible uses for a cantilever transducer (side view). (A) AFM force sensors, (B) tempera-
ture, heat sensor, (C) viscoelasticity sensor, (D) mass sensors (end load), (E) stress sensor, and
(F) sensor to monitor the presence of magnetic beads on its surface. Source:
Figure 2 from
Ref.
43
. Reproduced with permission.
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