Modeling of High Frequency Out-of-Plane Single Axis MEMS Capacitive Accelerometer - VLSI Design and Test - page 256

When proof mass and comb structure get attached to the folded beam then the
accelerometer resonance frequency decreases to 1.5 MHz. Proof mass displacement
and capacitance between fingers decreases exponentially with frequency.

5 Conclusion

Single axis folded beam based capacitive accelerometer for high frequency application
has been designed, beam support is modeled for a frequency of 4 MHz and the structure
shows the resonance frequency of 1.5 MHz. Accelerometer having high resonance
frequency find application in Navigation, missile guidance etc.

Acknowledgement. The authors would like to express their sincere thanks to Prof
B.R. Singh, Project guide, Department of Microelectronics. IIIT Allahabad for their
constant support and encouragement.

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