Biomedical Engineering Reference
In-Depth Information
CHAPTER
15
Vapor
-Deposition Tech
niques
Raúl J. Martín-Palma
a
and Akhlesh Lakhtakia
b
a
Department of Materials Science and Engineering, Pennsylvania
State University, University Park, PA 16802, USA
b
Department of Engineering Science and Mechanics, Pennsylvania
State University, University Park, PA 16802, USA
Prospectus
The term
vapor deposition
encompasses a large
palette of techniques essential for both the repro-
duction of certain structural features of a biotem-
plate and the replication of a biotemplate. Physical
vapor deposition, chemical vapor deposition, atomic
layer deposition, and molecular beam epitaxy are
succinctly described in this chapter in the context of
engineered biomimicry.
specific functionalities. As such, for either repro-
ducing specific geometric features of biological
structures or replicating biological structures,
fabrication techniques have to be suitable for the
accurate replication of features at very different
length scales. A variety of vapor-deposition
techniques is available for both biomimetics and
bioreplication.
In this chapter, the most commonly used vapor-
deposition techniques are reviewed. These tech-
niques include physical vapor deposition (thermal
and electron-beam evaporation, sputtering, laser
ablation, ion-beam-assisted deposition, oblique-
angle deposition, and conformal-evaporated-film-
by-rotation technique), chemical vapor deposition
(CVD), atomic layer deposition (ALD), and
molecular beam epitaxy (MBE). Given its
importance for engineered biomimicry, ALD is
also treated in Chapter 16 by Zhang and Knez.
Although not discussed in this chapter, it is worth
noting that the combined use of a focused ion
beam (FIB) and a scanning electron microscope
(SEM) could develop into a bioreplication
technique in the near future
[1]
.
Keywords
Atomic layer deposition (ALD), Chemical vapor depo-
sition (CVD), Electron-beam evaporation, Ion-beam-
assisted deposition (IBAD), Laser ablation, Molecular
beam epitaxy (MBE), Oblique angle deposition (OAD),
Physical vapor deposition (PVD), Pulsed laser deposi-
tion (PLD), Sputtering, Thermal evaporation
15.1 INTRODUCTION
Biological species are endowed with multiscale
structures, ranging from the nano- to micro-
to macroscale, which provide them with very
