Active micromixers - Micromixers Fundamentals Design and Fabrication - page 289

FIGURE 7.40
Active micromixers based on acoustic streaming around air bubbles (after [55] ).
top of the gold electrodes and worked as the piezoelectric material. In the last step, a 300 nm-thick gold
layer was deposited and worked as the top electrode. The PDMS part was then bonded to the quartz
wafer with the help of surface treatment in oxygen plasma. The induced acoustic streaming enhances
mixing in the microchannel significantly.
FIGURE 7.41
Active micromixers based on acoustic streaming with different electrode patterns (after [56] ).