Biomedical Engineering Reference
In-Depth Information
FIGURE 4.19
Fabrication of microchannel with polymeric surface micromachining: (a) a simple channel (after
[77]
);
(b) microchannel with functional coating of inner wall (after
[85]
).
4.3
METALLIC MICROTECHNOLOGIES
4.3.1
Metals as substrate materials
Metals are compatible to silicon-based processes, thus metallic micromixers can be fabricated with
conventional photolithography. In general, a silicon oxide layer or even the silicon wafer substrate can
work as the sacrificial layer. The metallic layer can be evaporated, sputtered, or electroplated on the
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