Biomedical Engineering Reference
In-Depth Information
FIGURE 4.9
Fabrication of microchannel with SU-8: (a) single layer combined with electroplating (after
[59]
) and (b) multiple
layer (after
[60]
).
beam micromachining
[65]
. Similar to near-UVexposure, a proton beam also causes polymerization in
SU-8. The depth of the polymerized area depends on the proton beam energy. This feature is used to
form a three-dimensional structure in SU-8.
Figure 4.10
(b) illustrates the relatively simple steps of this
technique. To start with, the SU-8 layer is spin-coated on the substrate (
Fig. 4.10
(b,1)). Writing with
low energy forms the top of the channel. With low energy, a proton beam can only penetrate shallowly
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