Biomedical Engineering Reference
In-Depth Information
FIGURE 4.1
Typical steps of pattern transfer using photolithography.
4.1.1.4 Physical vapor deposition
In contrast to CVD and thermal oxidation, physical vapor deposition (PVD) creates material films on
a substrate directly from a solid source. PVD is suitable for the deposition of electrically conducting
layers such as metals or silicides. The technique covers two physically different methods: evaporation
and sputtering.
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