Biomedical Engineering Reference
In-Depth Information
177. See, for example, Guckel, H. 2000. Built-in strain in polysilicon: Measurement and application
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178. Habermehl, S., A.K. Glenzinski, W.M. Halliburton, and J.J. Sniegowski. 2000. Properties of
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179. See, for example, Chasiotis, I., and W.G. Knauss. 2001. The influence of fabrication governed
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180. See, for example, Adams, P.M., R.E. Robertson, R.C. Cole, D. Hinkley, and G. Radhakrishnan.
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181. Mastrangelo, C.H. 2000. Suppression of stiction in MEMS. Pp. 105-116 in Materials Science
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182. See, for example, Louchet, F., J.J. Blandin, and M. Véron. 2001. In situ transmission electron
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system: Integration of MEMS for flight control. Pp. 85-94 in MEMS Components and Appli-
cations for Industry, Automobiles, Aerospace, and Communication, Proceedings of the SPIE
Volume 4559. H. Helvajian, S.W. Janson, and F. Larmer, eds. Bellingham, Wash.: The Interna-
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185. Grasmeyer, J.M. and M.T. Keennon. 2001. Development of the Black Widow Micro Air Ve-
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186. Lewis, D.H., S.W. Janson, R.B. Cohen, and E.K. Antonsson. 1999. Digital micropropulsion.
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187. Youngner, D.W., S.T. Lu, E. Choueiri, J.B. Neidert, R.E. Black, K.J. Graham, D. Fahey, R.
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188. Rossi, C., D. Esteve, N. Fabre, T. Do Conto, V. Conedera, D. Dilhan, and Y. Guelou. 1999. A
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