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Fig. 4. Diagram of simulation curve
4 Conclusions
The closed-loop transfer function of micro-stage system has been theoretically
established in the paper. Then the control algorithm combined PID control method
with BP neural network has been simulated with the software Matlab. The simulation
result illustrates that this algorithm has achieved the desired control effect.
References
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compliant mechanism. Precision Engineering 34(1), 133-138 (2010)
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amplification mechanisms arranged in parallel. Sensors and Actuators A: Physical 161,
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4. Minase, J., Lu, T.-F., Cazzolato, B., et al.: Adaptive identification of hysteresis and creep in
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