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Simulation of Micro Stage System
Based on BP Neural Network Control *
Jianying Shen
College of Mechanical & Electrical Engineering, Jiaxing University,
314001 Jiaxing, China
zjjxsjy@163.com
Abstract. The transfer function of micro stage system is set up in the paper and
the control algorithm combined PID control and BP neural network has been
simulated with Matlab software. The simulation result indicates that there are
no oscillation, no overstrike and smooth, and that the adjustment time is less
than 0.05 second. So the control performance of PID controller is good and the
control algorithm has achieved the expected effect.
Keywords: micro stage, BP neural network, simulation.
1 Introduction
With the development of science and technology, micro-displacement technology has
been widely applied in many fields [1,2,3], such as aeronautics and astronautics,
microelectronic engineering butting optical fiber, ultra-precision machiningrobot,
bioengineering, nanotechnology, etc. High precision micro stage system is an
important aspect of micro-displacement technology, and it is a key technology in
advanced science and engineering. As an ideal micro-displacement actuator,
piezoelectric actuator has many advantages: the small volume, high resolution, high
precision, no noise and fast frequency response. But the displacement accuracy is
affected by piezoelectric ceramic disadvantages [4], such as hysteresis, creep and
nonlinearity. Therefore, the control measure should be adopted to improve
displacement accuracy. In the paper the control algorithm combined PID control
method with BP neural network is presented and simulated in the software Matlab.
2 Model Establishing of Micro-Stage System
2.1 Control Structure of Micro-Stage System
Micro-stage system is composed of computer, interface circuit, D/A converter,
driving power, piezoelectric ceramics, micro-stage, displacement sensor, A/D data
acquisition circuit, which is illustrated in Fig. 1.
* Supported by Key Foundation of Jiaxing University (No. 70110X06BL).
 
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