Biomedical Engineering Reference
In-Depth Information
TABLE 13.1
Summary by Murray et al. Illustrates the Ability for in situ Characterization of Porous Films among Four Complementary
Techniques
Film
thickness
Refractive
index
(film and
skeleton)
Mean
film
density
Porosity Pore
size
distri-
bution
Surface
area
Elastic
modulus
Hardness Atomic
density
LSAW
EP
RBS/ERD
Nanoindentation
= Proven,
= Possible,
= Proven for dense films.
LSAW = laser-generated surface acoustic waves.
RBS/ERD = Rutherford backscattering/elastic recoil detection.
EP = ellipsometric porosimetry.
Source
: Courtesy of Elsevier. Murray et al. (2002).
 
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