Biomedical Engineering Reference
In-Depth Information
Reflectance is a ratio between the reflected and the incidence beam ampli-
tude. A ratio between the perpendicular and parallel-to-surface reflectance
components (
R
p
and
R
s
) specifies tangents of the ellipsometric angle Ψ:
tan Ψ =
|
R
p
|
|
In complex values, the relation of ∆ and Ψ can be expressed as follows:
tan Ψ
e
j
∆
=
R
p
R
s
Although both angles reflect thickness and material properties, practi-
cally ∆ reflects primarily thickness and Ψ material's properties or processes
occurred in the material.
Variations in the incident wavelength, AOI, time, and spatial references
give the basis for the spectroscopic, variable angle, dynamic, and imaging ellip-
sometry, respectively. From Ψ and ∆ and optical model analysis, the refractive
index (
N
=
n
+
ik
), thickness (
d
), and coverage (
|
R
s
) of the surface film can be
derived. For porous media, a parameter of interest is surface mass density
(Γ), which is reduced from thickness and refractive index into a comprehen-
sive, simple parameter.
If the film is suciently transparent, so the extinction coecient,
k,
is
rather constant,
N
=
n
can be assumed to make the observation of the film
thickness variation much easier directly from the change of the ellipsomet-
ric angles ∆. If the
k
varies with film thickness, the interpretation of the film
thickness and optical property becomes more complicated. A common practice
to deal with this situation is to use a simple volume averaging approach (Equa-
tion 13.1) or the effective-medium theory and approximation (Equation 13.2)
to assess the variations in the dielectric function. Thus,
ε
=
θε
i
+(1
θ
−
θ
)
ε
amb
(13.1)
θ
)
/ε
amb
(13.2)
where the dielectric function
ε
=
N
2
is for the “equivalent” interface layer,
while
ε
i
is for the intrinsic layer composition, and
ε
amb
is for the ambient,
respectively;
1
/ε
=
θ/ε
i
+(1
−
θ
is the surface coverage for the thin film. For porous media,
θ
. This simpli-
fied approach is only valid when a simple geometry is involved so the elec-
tric field can be treated fairly in a perpendicular and parallel fashion. With
oblique incidence, the use of such approximations should be cautious, espe-
cially when the pore shape is irregular or the pore size variation is significant.
The anisotropy and possible birefringence should be considered in due dili-
gence. To apply effective-medium approximation, the Bruggeman theory (von
Bruggeman 1935) is often used to give the following equation for the calcula-
tion of the surface coverage
can be replaced with a volume fraction of the solid media
φ
θ
or the volume fraction of the solid media
φ
(the
two are interchangeable in this case):
θ
[(
ε
i
−
ε
)
/
(
ε
i
+2
ε
)]+(1
−
θ
)[(
ε
amb
−
ε
)
/
(
ε
amb
+2
ε
)] = 0
(13.3)
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