Biomedical Engineering Reference
In-Depth Information
<100>, 1° OFF
<011>
<010>
FIGURE 2.63
Wafer orientation of double-Y device.
-
<011>
1
E E
x
2
y
2
z
2
r E yz
=
and IE
=
(
+
+
)
+
2
(
)
(2.8)
x
41
x
ʹ
2
n
0
We transform the standard IE to primed coordinates. By symmetry
ʹ
=
ʹʹ
=
ʹ
2
=
ʹ
2
(2.9)
x
x
x
x
x
x
By inspection
y
z
y
ʹ
z
ʹ
y
ʹ
=
√
2
;
y
+
√
=
−
2
(2.10)
2
√
2
√
(
−
√
y
)
z
y
ʹ
z
ʹ
z
ʹ
=
2
;
z
+
√
=
+
2
√
2
√
2
2
2
y
ʹ
z
ʹ
y
2
+
ʹ ʹ
y z
=
+
2
2
2
2
y
ʹ
z
ʹ
z
2
+
ʹ ʹ
y z
=
+
2
2
2
2
y
ʹ
z
ʹ
yz
=
−
2
2
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