Biomedical Engineering Reference
In-Depth Information
There are numerous possible applications for MEMS and nanotechnol-
ogy. As a breakthrough technology, allowing unparalleled synergy between
previously unrelated fields such as biology and microelectronics, many new
MEMS and nanotechnology applications will emerge, expanding beyond
that which is currently identified or known. Following are a few applica-
tions of current interest.
7.2.2 Biotechnology
MEMS and nanotechnology are enabling new discoveries in science and
engineering such as the polymerase chain reaction (PCR) microsystems
for DNA amplification and identification, micromachined scanning tun-
neling microscopes, biochips for detection of hazardous chemical and bio-
logical agents, and microsystems for high-throughput drug screening and
selection.
7.2.3 Communications
High-frequency circuits will benefit considerably from the advent of the
RF-MEMS technology. Electrical components such as inductors and tun-
able capacitors can be improved significantly compared to their integrated
counterparts if they are made using MEMS and nanotechnology. With
the integration of such components, the performance of communication
circuits will improve, while the total circuit area, power consumption,
and cost will be reduced. In addition, the mechanical switch, as devel-
oped by several research groups, is a key component with huge potential
in various microwave circuits. The demonstrated samples of mechani-
cal switches have quality factors much higher than anything previously
available.
Reliability and packaging of RF-MEMS components seem to be the two
critical issues that need to be solved before they receive wider acceptance by
the market.
7.2.4 Accelerometers
MEMS accelerometers are quickly replacing conventional accelerometers
for crash air-bag deployment systems in automobiles. The conventional
approach uses several bulky accelerometers made of discrete components
mounted in the front of the car with separate electronics near the air bag;
this approach costs over $50 per automobile. MEMS and nanotechnology
have made it possible to integrate the accelerometer and electronics onto a
single silicon chip at a cost between $5 and $10. These MEMS accelerometers
are much smaller, more functional, lighter, and more reliable and are pro-
duced for a fraction of the cost of the conventional macroscale accelerometer
elements.
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