Biomedical Engineering Reference
In-Depth Information
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FIGURE 6.5
Thickness of proton implanted waveguide versus carrier concentration, which can be evalu-
ated by a direct CV profile.
DVM
Thermo-
couple
HP
LRC
Meter
Sample
Insulated
chamber
HP-9845
FIGURE 6.6
Block diagram of C-V measurement system.
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