Biomedical Engineering Reference
In-Depth Information
13
Polypyrrole Nano- and
Microsensors and Actuators
for Biomedical Applications
Yevgeny Berdichevsky and Yu-Hwa Lo
CONTENTS
13.1 Introduction .........................................................................................................................
368
13.2 Polypyrrole Actuators—Synthesis and Principles of Operation.........................................
369
13.2.1 Introduction ............................................................................................................
369
13.2.2 Polypyrrole Electrochemistry ................................................................................
369
13.2.2.1 Electropolymerization of Polypyrrole ...................................................
369
13.2.2.2 Polypyrrole Conductivity .......................................................................
369
13 2.2.3 Doping of Polypyrrole with DBS Ions...................................................
370
13.2.2.4 Electrochemical Cycling of PPy(DBS)..................................................
370
13.2.2.5 Volume Change Due to Reversible Electrochemical Redox
Reaction of PPy(DBS) ...........................................................................
372
13.2.2.6 Time Response of the Polypyrrole Films ..............................................
373
13.2.3 Actuation of Polypyrrole Microstructures .............................................................
374
13.2.3.1 Microfabrication of the Polypyrrole Test Lines.....................................
374
13.2.3.2 Measurement of Electrochemically Controlled Thickness
Change of Polypyrrole Test Lines..........................................................
374
13.2.4 Integration of Polypyrrole Microstructures
with Silicon Devices...............................................................................................
376
13.2.4.1 Fabrication of an Optically Controlled Polypyrrole
Microstructure .......................................................................................
377
13.2.4.2 Operation of the Device .........................................................................
377
13.3 Polypyrrole Microactuators .................................................................................................
378
13.3.1 Bilayer Actuators....................................................................................................
378
13.3.2 Direct-Mode Polypyrrole-PDMS Microvalve .......................................................
379
13.3.2.1 Microfabrication of the Active Part of the Microvalve..........................
380
13.3.2.2 Microfabrication of the Passive Microfl uidic Component.....................
381
13.3.2.3 Microvalve Operation ............................................................................
382
13.4 Polypyrrole Nanodevices.....................................................................................................
383
13.4.1 Introduction ............................................................................................................
383
13.4.2
Polypyrrole Nanowire Electropolymerization and Evaluation
of the Electrochemically Controlled Volume Change ...........................................
383
13.4.2.1
Removal of Hollow Region of Synthesized Polypyrrole
Nanowires by Mechanical Lapping .......................................................
383
13.4.2.2
SEM Evidence of Electrochemically Induced Volume
Change in Polypyrrole Nanowires .........................................................
384
367