Biomedical Engineering Reference
In-Depth Information
%12.1
%8.1
%4.0
%0.0
0.00e + 000 nm
7.43 nm
14.88 nm
22.28 nm
Step: 16.6 nm
0
µ
m
13.86
µ
m
Fig. A1. AFM image is of a single etched pit in a patterned AFM standard. The histogram at the
right shows the height of the feature is 16.6 nm.
As an example, Figure A2 shows an image of a common
Z
calibration specimen.
A2 X-Y Calibration and linearity
Calibration of the AFM in the
X-Y
axis so that accurate dimensional measurements can be
made requires establishing the linearity and orthogonality of the AFM scanner. For large
scale measurements, this requires a repeating pattern, with well controlled spacing (pitch)
Table A1. Commercial specimens for
Z
calibration.
Company and url
Z
calibration reference
VLSI standards
18, 44, 100 and 180 nm (silicon)
18 nm to 8
m (quartz)
MikroMasch
20, 100, 500 nm and 1 and 1.5
m, HOPG
NTT AT
Silicon monatomic steps (0.31 nm)
Ted Pella
20, 100 and 500 nm (Silicon)
10 nm, 1
m
Applied NanoStructures
Veeco
2, 100, or 200 nm (silicon)
NT-MDT
20, 100 or 500 nm (silicon)
Silicon atomic steps (0.31 nm)
Asylum Research
200 nm (metal on silicon)
Nanosensors
8 nm (silicon)
