Sensor - The Electronic Nose Artificial Olfaction Technology - page 65

Fig. 2.21 Example: fabrication process of accelerometer

References

1. W.M. Richard, A sensor classification scheme. IEEE Trans. Ultrason. Ferroelectr. Freq.
Control, UFFC-34(2) (March 1987)
2. J. David Zook, N. Schroeder, in Sensors as Information Transducers. Published in:
Encyclopedia of Sensors, ed. by C.A. Grimes, E.C. Dickey, M.V. Pishko vol. 9 (American
Scientific Publishers, Stevenson Ranch, California) pp. 329-359
3. NSDL OAI Repository, http://www.analog.com/library/analogDialogue/archives/42-03/

CH03-H8703.pdf
4. WIKA Handbook, Pressure and Temperature Measurement, www.mika.com
5. NSDL OAI Repository, http://www.omega.com/temperature/Z/pdf/z021-032.pdf
6. Basic instrumentation measuring devices and basic PID controls.pdf, Science and Reactor
Fundamentals. Instrumentation & Control CNSC Technical Training Group
7. NPTEL lecture series, Version 2, IIT, Kharagpur. http://nptel.iitk.ac.in/
8. F.S. Tse, I. Morse, Measurement and Instrumentation in Engineering (Marcel Dekker, New
York, 1989)
9. Technical Guide Book: Flow Sensors, www.keyence.com
10. NSDL OAI Repository, http://www.capsense.com/capsense-wp.pdf
11. Guide to Displacement Sensor, www.keyence.com
12. Z. Chen, L. Chi, Humidity sensors: a review of materials and mechanisms. Sens. Lett. 3,
274-295 (2005)
13. Instruments Engineers' Handbook, National nuclear security administration (nevada). http://
www.jcte.jcs.mil/
14. G.K. Fedder, MEMS Fabrication. Department of Electrical and Computer Engineering, and
The Robotics Institute Carnegie Mellon University, Pittsburgh, USA
15. http://www.utwente.nl/ewi/tst/education/el-bach/mandt/extra/background/mems_sensors.pdf
16. Technical Guide: Pressure Sensor, www.keyence.com
17. Various techniques of liquid and solids level measurements, Indumart Newsletter (2009)