Biomedical Engineering Reference
In-Depth Information
needed to evaluate the actuator characteristics of the TiNi thin films in service in micro-
mechanical systems. Systematic investigation on the interaction between TiNi films and
substrates is also demanded to achieve tight bonding of the films onto the substrates with-
out much chemical reaction between them. With further development of fabrication and
characterization techniques, it is clear that a variety of micromechanical systems utiliz-
ing microactuators of TiNi thin films will be developed and present important technical
impacts in the quite near future. At microscale, TiNi actuators out-perform other actuation
mechanisms in work/volume (or power/weight) ratio, large deflection and force, but with
a relatively low frequency (less than 100 Hz) and efficiency, as well as nonlinear behavior.
More functional and complex designs based on TiNi film devices are needed with multi
degree-of-freedom and compact structure. TiNi film-based microactuators will find poten-
tial applications in medicine, aerospace, automotive, and consumer products. Miniature
TiNi-actuated devices based on sputtered TiNi films are ready for the huge commercial
market, especially for medical microdevices and implantable applications.
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