Biomedical Engineering Reference
In-Depth Information
9
MedicalApplicationsofSputter-Deposited
Shape
Me
moryAlloyThinFilms
YongQingFu,WeiMinHuang,andShuichiMiyazaki
CONTENTS
Introduction ................................................................................................................................. 382
Biomedical Application of TiNi Alloys ............................................................................... 382
Thin Film TiNi SMAs............................................................................................................. 384
Shape Memory Effect and Martensitic Transformation ........................................................ 387
TiNi Phase Diagram ............................................................................................................... 388
Crystallography of Martensitic Transformation ................................................................ 389
Transformation Strain ............................................................................................................ 391
Transformation Temperatures .............................................................................................. 393
Shape Memory and SE .......................................................................................................... 393
Deformation Behavior ........................................................................................................... 395
Film Fabrication and Characterization .................................................................................... 397
Film Deposition ...................................................................................................................... 397
TiNi Film Characterization ................................................................................................... 400
TiNi Binary Alloy Thin Films........................................................................................... 401
Ni-Rich TiNi Alloy Thin Films......................................................................................... 406
Ti-Rich TiNi Alloy.............................................................................................................. 410
TiNiX Ternary Alloy Thin Films ...................................................................................... 414
Film Stress and Stress Evolution .......................................................................................... 420
Frequency Response .............................................................................................................. 424
Adhesion and Interfacial Analysis....................................................................................... 425
Stability, Degradation, and Fatigue ..................................................................................... 425
Film Thickness Effect ............................................................................................................. 428
Temperature Memory Effect ................................................................................................. 429
Nanoscale Mechanical Evaluation....................................................................................... 430
Functionally Graded and Composite-Based Films ........................................................... 431
Modeling.................................................................................................................................. 433
Biocompatibility of Thin Films............................................................................................. 433
Biological and MEMS Applications of TiNi Thin Films ........................................................ 434
Comparison of Microactuation Mechanisms ..................................................................... 434
Freestanding Microactuators Based on Two-Way Shape Memory Effect ...................... 434
TiNi Diaphragms, Micropump, and Microvalves ............................................................. 437
Microdiaphragm Using R-Phase of Ti-Ni...................................................................... 441
Microdiaphragm Using M-Phase of Ti-Ni-Pd..............................................................442
Microdiaphragm Using M-Phase of Ti-Ni-Cu ............................................................. 443
Microgrippers .........................................................................................................................444
381
