Biomedical Engineering Reference
In-Depth Information
(a)
(b)
Piezoelectric
substrate
Surface
displacement
Output
IDT
Bottom
electrode
Top
electrode
Input
IDT
(c)
Output
IDT
(d)
Surface
displacement
Input
IDT
Cross-
sectional
displacement
(f )
(e)
Output
IDT
in
film
trapping
layer
Surface
displacement
Top electrodes
Input
IDT
AIN
Si
(g)
Top electrodes
AIN
Si
Acoustic mirror
FIGURE 8.1
Illustration of different types of acoustic wave devices: (a) QCM; (b) Rayleigh wave SAW; (c) SH wave;
(d) Lamb Wave; (e) Love mode wave; (f) membrane-based FBAR; (g) reflector based FBAR. (From Marx, K.A.
Biomacromolecules
, 4, 1099, 2003; Durdag, K.,
Sens. Rev.
, 28, 68-73, 2008; Nguyen, A.H., White, R.M.
J. Micromech.
Microeng.
, 2, 169-174, 2000. With permission.)
