A Planar Integrated Micro-mass Spectrometer - LC-MS in Drug Bioanalysis - page 446

Table 2 PIMMS structures and the assembly of electronic components

Plasma-DC-
bias-detection

HV-pulse-
generator

pA-current
measurement

Traveling
wave Gen.

Valve
control

Pump and
pressure control DC-Sources HV-Source RF-Generator

× × × × ×

Plasma Chamber

× × ×

Ionization chamber

× ×

Ion optic

× ×

Separator (DC)