Biomedical Engineering Reference
In-Depth Information
Fig. 2 Principle of mass
separation in the SIS
separator
stream will travel ballistically through the filter, as they pass a dynamically field free
volume, ions which are faster (lower mass) or slower (higher mass) are subjected to
a field perpendicular to the trajectory and are deflected towards the electrodes. By
changing the pulse stream frequency ions of the same energy are selected according
to their velocity, i.e., mass.
The separator is followed by a 90 ° energy filter, which selects the right energy-
mass combination via an output slit. The selected ions finally hit the detector, which
is a Faraday cup. Alternatively between the detector and the output of the energy
filter a MCP is hybridly integrated by inserting it into a self-adjusting and contact-
ing integrated spring arrangement, which is also fabricated in this process.
The total system is evacuated to a pressure of <1 Pa through the sideways open
structures in the glass-silicon-glass sandwich. For electrical contact the chip is
presently bonded to a PCB, which also serves as vacuum seal.
3
Simulation and Layout
3.1
Overview
For the layout of the PIMMS-structures a variety of boundary conditions and limita-
tions have to be considered with respect to both the physical principles as well as tech-
nological and size restrictions. Since the functions of the different PIMMS-elements
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