Advanced Methods for the Analysis of Semiconductor Manufacturing Process Data - Advanced Techniques in Knowledge Discovery and Data Mining - page 38

Lot (25 wafer ) After split

Split

Common steps Common steps

Different processing
at one or several stations

Fig. 2.7. Illustration of the split operation.

Missing data

Affected by split

Not affected by split

A priori knowledge

Fig. 2.8. Typical result from conventional statistical analysis. The three split
groups have been separated by a priori knowledge and are shown in a single di-
agram to facilitate further evaluation of the experiment.

parameter changes and the side effects should be flagged as belonging to the
split.