Advanced Methods for the Analysis of Semiconductor Manufacturing Process Data - Advanced Techniques in Knowledge Discovery and Data Mining - page 33

Fig. 2.3. Batched 300-mm wafers ready to go into a vertical furnace (open furnace
tube on the upper left).
sequence of operations (called a recipe) within the tool. It is now common to
have so-called cluster tools comprising of multiple stations capable of running
a variety of processes, so a recipe can be quite complex.
While the process record has been moved into an electronic database,
it has also been expanded over time to contain more data. Measurement
equipment will generally store results to a dedicated database before a result
summary is attached to the process record. Additionally there are separate
databases dedicated to certain tools or tool groups for recipe repositories and
recording events and in situ measurements during processing. The trail of