Bioceramic Coating on Titanium by Physical and Chemical Vapor Deposition - Biological and Biomedical Coatings: Processing and Characterization - page 303

Vacuum deposition Sputtering

Substrate
Coating

Heater

Surface
migration
Re-evaporation,
resputtering E field

Collision
deposition Gas inlet

(Ar)

Collision

Substrate

Scattering

Ar + ion
Sputtered atom

Sputtering

Vacuum
chamber

Source material

Target

Vacuum
chamber

Heater

Matching
network

Exhaust Exhaust

Ion plating Pulsed laser deposition (PLD)

Lens Laser

Heater

Substrate

Substrate

Gas inlet Gas inlet

Plasma

Plume

Target

Vacuum
chamber

Vacuum
chamber

Source material

Exhaust Exhaust

FIGURE 7.5
Schematic of vacuum deposition, sputtering, ion plating, and pulsed laser deposition methods.

Energy

Heat
Plasma
Laser

Source
gas

Solid source material

Gaseous
source
material

Coating

Substrate

Reaction chamber

Carrier gas

Liquid source material

Carrier gas

FIGURE 7.6
Schematic of CVD method.