Biomedical Engineering Reference
In-Depth Information
Figure 3.3
Fabrication process of a
microfl uidic device for magnetophoresis. The
microfabrication process consists of PDMS
micromolding and nickel electroplating. In the
nickel electroplating step (A3), a CMP process
ensures the even height of the nickel
structures. After air plasma treatment of
PDMS substrates, the microfl uidic devices
were achieved by an alignment between the
microchannels and the nickel microstructures.
Reproduced with permission from Ref. [41];
© 2007, Wiley-VCH Verlag GmbH & Co.
KGaA.
Figure 3.4
The microfl uidic PDMS device fabricated by the processes described in Figure 3.3.
