Environmental Engineering Reference
In-Depth Information
TABLE 13.1
Overview of High-Purity Water Users and their Different Concerns
Industrial
End User
Primary Guidelines/
Standards
b
Types of Water
Treated Water Uses
Treated Water Concerns
a
Semiconductor/
electronics
Semiconductor grade
Cleaning microchips as part of the
manufacturing process; immersion litho,
chemical dilution
Particles, metals, and organic
contaminants in water can cause
device (microchip) yield loss during
production, as well as failure of
long-term completed chip devices
SEMI, ASTM
Solar
Photovoltaic (PV) high-purity and
standard purity water
Water is used in the production of
photovoltaic cells and all wet processing
steps such as the rinsing of substrate
wafers and panels
Particles, metals, and organic
contaminants can inluence product
loss
SEMI, ASTM
Pharmaceuticals
c
Bacteriostatic Water for Injection,
Puriied Water, Sterile Puriied Water,
Sterile Water for Inhalation, Sterile
Water for Injection, Sterile Water for
Irrigation, and Water for Injection,
Water for Hemodialysis, Pure Steam,
and Highly Puriied Water
Container and equipment cleaning, product
ingredient; intravenous luids; some
consumer products; product contact of
ingredient; product contact of medical
device (cleaning); reagent or solvent in
drug manufacturing (but not in inal
product)
1. Chemical, microbial, and
endotoxin contamination. 2. In
some cases, speciic controls are
additionally needed (i.e., aluminum
for Water for Hemodialysis)
USP, EP, JP, WHO
Power
d
High-purity makeup and boiler water
for subcritical and supercritical boilers
Boiler water to produce steam for turbines
Corrosion and scaling caused by
water contaminants that may
contribute to equipment failures
and plant shutdowns
EPRI, ASME, ASTM,
IAPWS
Source:
Compiled by M. Henley,
Ultrapure Water Journal
, Denver, CO. Copyright 2014.
Note:
ASME = American Society of Mechanical Engineers; ASTM = American Society for Testing and Materials, also known as ASTM International (ASTMI); EP = European
Pharmacopeia; EPRI = Electric Power Research Institute; IAPWS = International Association for the Properties of Water and Steam; JP = Japanese Pharmacopeia; SEMI =
Semiconductor Equipment and Materials International (the International Technology Roadmap for Semiconductors develops materials that serve as a basis for SEMI
standards.); USP = United States Pharmacopeial Convention Inc. (USP guidelines call for using a water source that meets US EPA standards for drinking water. The US
FDA uses the USP standards as a part of its inspection and validation process at pharmaceutical, biopharmaceutical, and other facilities producing products requiring
pharmaceutical quality water; WHO = World Health Organization.
The examples listed are commonly associated with these areas of high-purity water treatment.
a
These are examples of the principal sources for high-purity water treatment standards and guidelines in the industries covered in this table. It should be noted that companies within
an industry will develop speciic standards and protocols that they follow, and that service companies serving an industry have developed guidelines that become widely recognized
standards and followed in the treatment of high-purity water. Examples would include Balazs Laboratories (now known as Air Liquide-Balazs NanoAnalysis) for the semiconductor
industry (
Balazs Ultrapure Water Monitoring Guidelines
), and the Babcock and Wilcox handbook,
Steam: Its Generation and Use
. In the case of semiconductor water, Deutsches Institut für
Normung (DIN), ASME, and International Organization for Standardization (ISO) are viewed as reference sources for particular water treatment concerns.
b
Besides the pharmaceuticals and biopharmaceuticals, other end users that strive for these grades of water would include medical device manufacturers, and consumer goods
(e.g., cosmetics) that must meet USP quality water for their products.
c
Power plants requiring high-purity water commonly have subcritical or supercritical boilers (3200 psig). While this is true, it should be noted that facilities with high-pressure boilers
900
+
psig will also produce DI water that approaches or also meets high-purity water standards. Besides fossil-fuel power plants, nuclear power plants also require high-purity water.
d
