Environmental Engineering Reference
In-Depth Information
17
Proud, J.
et al.
(1991)
Plasma Process-
es of Materials: Scientific Opportunities
and Technological Challenges
,National
Academy Press, Washington.
18
Rickbery, D.S. and Mathews, A. (1991)
Surface Engineering: Processes, Characteri-
zation and Applications
,BlackieandSon,
Glasgow.
19
Howlett, S.R., Timothy, S.R., and Vaugh-
an, D.A. (1992)
Industrial Plasmas: Fo-
cusing UK Skills on Global Opportunities
,
CEST, London.
20
Grill, A. (1994)
Cold Plasma in Mate-
rial Fabrication. From Fundamentals to
Applications
, IEEE Press, New York.
21
Holohan, J.R. and Bell, A.T. (1974)
Techniques and Applications of Plasma
Chemistry
, John Wiley & Sons, Inc., New
York .
22
Fridman, A.A. (2008)
Plasma Chem-
istry
, Cambridge University Press, Cam-
bridge.
23
Chapman, B.N. (1980)
Glow Discharge
Processes - Sputtering and Plasma Etching
,
John Wiley & Sons, Inc., New York.
24
Manos, D.M. and Flamm, D.L. (1989)
Plasma Etching. An Introduction
,Aca-
demic Press, San Diego.