Biomedical Engineering Reference
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Mo (110)
AlN (002)
2ʸ-ˉ
Fig. 3.3 Mo/AlN/Mo piezoelectric transducer on Kapton substrate with a circular dome and
diameter of 600
m.
Inset
: Rocking curves of the Mo/AlN/Mo structure on Kapton (FWHM is
0.55
for the AlN peak)
μ
Fig. 3.4 Mechanoreceptors in human skin and different applied mechanical stimuli
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