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Fig. 11.7 REM images of Si(111) surface morphology during annealing at 900 C after deposition
of 0.7ML of gold ( a - d )
into the bulk. After 16min of annealing the step-bunched structure (Fig. 11.7 a) was
fluently transformed into an array of regular steps (Fig. 11.7 b). This transformation
was supplemented by atomic step motion in both (step-up and step-down) direc-
tions and increasing fluctuations of step shape. At the same time the observation
of RHEED pattern revealed no any additional reflections at 900 C but the intensity
of the basic (1
1) reflections increased in comparison with one measured imme-
diately after gold deposition. After formation of regular array of atomic steps the
sample temperature was reduced to 500 C and the RHEED picture was analyzed.
Additional patterns corresponding to the Si(111)-(5
×
2)Au reconstruction were reg-
istered. According to the surface phase diagrams [ 55 , 56 ] the formation of the (5
×
2)
domains on gold-deposited silicon surface occurs in gold coverage range of 0.42-
0.6ML.
Subsequent isothermal annealing at 900 C in an ultra high vacuum chamber dur-
ing 23min caused step bunching (Fig. 11.7 c). This transition was supplemented
by increasing the (1
×
1) reflection intensity at RHEED pattern. Further annealing
during 27min caused the formation of regular steps on the surface (Fig. 11.7 d).
Decreasing to 500 C, RHEED picture clearly identified the (7
×
×
7) reflections that
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