Comparisons of Techniques - Sample Preparation Topic for Transmission Electron Microscopy - page 211

Fig. 8.19 Bright-field TEM
image of the same sample
prepared using the FIB
technique and the “H Bar”
method. Platinum has been
deposited on the surface of
the oxide to protect it during
the thinning process.
( M. Cantoni, EPFL - CIME,
Lausanne )
laser ablation on titanium: Hydroxyapatite (HA) on titanium TiN/Ti or
hydroxyapatite (HA) on TiN/Si
Comparison discussion : These materials present extreme physical-chemical
properties and, consequently, are very difficult to prepare in thin slices for the TEM
(Figs. 8.20, 8.21, and 8.22) .
Fig. 8.20 Low-magnification image of the thin slice obtained using FIB. The HA/TiN/Ti material
is thinned using the FIB technique. The hydroxyapatite layer is protected by a film of platinum
which is evaporated in the FIB thinner, before being cut out by the ion beam, in order to protect
it. The surface, however, is not very regular, and the Pt film has been removed in two areas. ( M.
Iliescu, J. Werckmann IPCMS Strasbourg )